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1kN硅片弯曲夹具

夹具

作为集成电路或分立器件衬底的硅单晶抛光片,其重要的几何参数之一翘曲度和弯曲度的测量可以反映了硅片的体变形和应力情况，影响着光刻的质量。该夹具可进行硅片弯曲测试，上夹具通过压缩连接件与主机上部连接，下夹具与主机下横梁连接，硅片放于下夹具指定位置，通过上夹具R2.5的球头下压进行试验。

特点

特点1：操作简答，维护保养方便。
特点2：可以进行1kN以下试验力的硅片弯曲测试。
 

规格

1kN

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